MEMS (microelectromechanical systems) / LIGA technology

During the development process of microstructures with high aspect ratio, the particles are completely flushed out due to the created micro stream, and the development time is reduced by a factor of 7. For fragile structures, the depth of the structures can be increased by a factor of 2

Microstructure developed without  Megasonic support                  

Microstructure developed with Megasonic support