SONOSYS Megasonic

Welcome at SONOSYS®

High frequency ultrasonic cleaning systems - this is our strength! In close partnerships with research institutes and our customers, complementary abilities are converted into synergistic benefits for better solutions. The result is the most compact megasonic generator and transducer in the world with a unique design. SONOSYS® has mastered, like no other company, the manufacturing of high-frequency ultrasonic systems in the range between 400 kHz and 9 MHz (read about the latest recognition of SONOSYS as one of Germany's Top 5 Semiconductor Tech company by Semiconductorreview here). Let's "master nanoClean together", which is the guiding motto of SONOSYS®. Our main markets are wafer cleaning (semiconductor), microstructures/MEMS, LIGA technology, solar/PV and optics - see a markets-overview here.

SONOSYS is recognized as "TOP-5 Semiconductor Tech Company" in Germany

What our customers say about us ...

"In the area of Megasonic equipment SONOSYS has been our supplier for many years already. The products are superb and if challenges arise, there is always prompt response to find jointly a solution. We are extremly satisfied."


„We do have special requirements when it comes to the use of high-power ultrasound in food-industry applications. With SONOSYS® we have found a qualified partner for this. The products are innovative solutions with highest quality and we appreciate the excellent cooperation with SONOSYS® as a development partner for trend-setting applications.“

Prof. Dr.-Ing. Bernhard Gatternig, Lehrstuhl für Strömungsmechanik, Friedrich-Alexander-Universität Erlangen-Nürnberg

“Over the past 10+ years, we have had a very fruitful collaboration with SONOSYS, and have found them to be an always reliable partner. SONOSYS has, again and again, shown very fast reaction times and provided flexible and highly novel solutions to suit our needs across numerous projects in the food and beverage industry."

Dr. Kai Knoerzer, CSIRO, Australia

„With the Megasonic nozzles from SONOSYS® in AP&S wafer cleaning machines a stable process and cleaning efficiency in different wet processes is guaranteed. Before purchase, the customer has the possibility to test the process control and results within AP&S equipment and the use of a SONOSYS® nozzle in a live demo in the AP&S demo center.“

Stefan Zürcher, Team Leader Process Engineering & Laboratory AP&S International GmbH

„We are offering consulting for different wet process solutions, e.g. in the area of MEMS or microsystems. With SONOSYS® there is always a competent partner to find individual solutions for different requirements and cleaning tasks.“

Manfred Vogel, Sales Manager, Hilpert electronics AG

“We have integrated Sonosys Ultrasonic products into our lithography processing tools for many years and we have great confidence in Sonosys’ products”


„SONOSYS® is a reliable partner for us for Megasonic solutions. We do integrate them in our machines preferably.“


Sonosys Inside

mastering NanoClean together

The most important objective of SONOSYS® is always to offer the customer the maximum benefit. SONOSYS® deploys its abilities with a precision that has no competition, to solve the problems and satisfy the requirements of its customers. For SONOSYS®, the continuously changing requirements and technical frame conditions mean continuous performance improvement.



cleaning with Megasonic energy

SONOSYS® is the first European company in the global market to provide ultrasonic cleaning systems in the frequency range from 400 kHz to 5 MHz. SONOSYS® is a company with many years of experience and know-how in the development, production and sales of innovative Megasonic cleaning technologies. Main markets are semiconductor and MEMS wafer cleaning, solar/photo-voltaic and optics.

Overview Markets

Life is life

first test, then decide

We offer demo systems for your in-house testing on a rental basis. This way you can experience Megasonic cleaning first hand and see the advantages for your application yourself. Read more details here or directly request the demo sytem with the button below.

Request demo system

Please select the time period for the demo system rental:

Demo system*
Submersible transducer demo system
Megasonic demo system with nozzle and generator
Nebulizer demo system

AP&S Demo Center

AP&S is a well-known equipment manufacturer for wafer cleaning solutions. In the company's demo-center it is possible to run 'real-world tests' for substrate cleaning with the use of chemicals, temperature regulation and megasonic. We are glad to assist in establishing contact and making an appointment for you.